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Use the Right Tool to get the Right Result!
Scanning Acoustic Microscopy, commonly referred to as SAM or SAT (Scanning Acoustic Tomography) is unparalleled in its ability to spot delaminations, cracks and other anomalies non-destructively. Not only does acoustic microscopy detect the failures but it also can provide the specific location of the problem. Sonix™ SAMs high resolution images and advanced diagnostic tools are used to:
- Diagnose device failures and discover failure "root causes"
- Monitor production sampling
- Qualify new package or production designs
- Research new materials or processes
The Sonix™ Advantage
The purchase of a Scanning Acoustic Microscope (SAM) is a major decision. A primary consideration in the purchase process is the system must be capable of producing the desired benefits for years to come. In a world of constant technological advances, knowing the "true" architecture of a product is the key to reducing obsolescence, allowing for cost-effective upgrades, and reducing down time through serviceability. Sonix™ utilizes state-of-the-art technology that ensures your investment meets current and future expectations. Below is a listing of our line of SAM systems currently available for a variety of semiconductor inspection needs.
Sonix™ Echo™
ECHO™
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 Sonix™ ECHO can detect defects as small as 0.05 micron and is an excellent tool for bump detection, stacked die (3D Packaging) inspection, complex flipchip inspection and more traditional plastic packages. |
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ECHO VS™
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 The Sonix™ ECHO VS is our leading edge scanning acoustic microscope and is in a class of its own. The ECHO VS is designed to provide industry leading defect identification capability and image quality. It comes standard with our Image Enhancement suite which includes Heated Water, Flexible TAMI, WinIC Pro, MFCI™ and Waveform Averaging. This tool is ideal for advanced packaging, including molded flip chip, stacked die, TSV, Cu Pillar and more. If you re working with leading edge packages or wafers, the ECHO VS is the solution. Contact Sonix™ sales for more information: sales@sonix.com. |
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ECHO PRO™
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 Sonix™ has developed the next generation, fully automated JEDEC tray handling SAM solution. If your production application has high volume and low mix, perhaps an automated tool is something that would increase productivity and defect detection. Using the reputable and reliable ECHO scanner as the base system, Sonix™ incorporated industry standard SMEMA input and output handlers to this tool. Additionally, the tool is equipped with a pick and place gantry which optimizes part handling and decreases drying time. This is a revolutionary, robust design that benefits high throughput needs of production customers. To learn more about the ECHO Pro and all of its capabilities contact Sonix™ sales for more information: sales@sonix.com. |
Sonix™ Wafer Solutions
Sonix™ is the industry leader, with fully automated and manual scanning acoustic microscopes for wafer applications. Sonix™ has developed a full line of hardware and software solutions, which focus on finding defects and improving process control in bonded wafers, CMOS, Memory, TSV, LED applications. Our tools can handle applications from 150mm to 300mm. Sonix™ has developed extensive analysis capabilities at both wafer and device lever. The Auto Wafer and Auto Wafer Pro are currently 200mm SECS/GEM compliant. Our manual and automated wafer tools are installed globally at the industries most leading companies. For more information about our wafer solutions please contact Sonix™ sales: sales@sonix.com.
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AutoWafer™
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 Sonix™ has updated our long standing industry leading AutoWafer with a new housing, new scan station and new software to meet the needs of our customers. This is tool is installed in more wafer applications than all other wafer scanning tools combined. Designed to handle 200mm wafers (or smaller) for MEMS, CMOS, Memory, TSV and LED applications, this tool is a solid performing tool with many capabilities. For more information about our wafer solutions please contact Sonix™ sales: sales@sonix.com. |
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AutoWafer Pro™
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 The AutoWafer Pro is a flexible, automated wafer tool designed for production. This tool can help achieve rapid ramp to yield improvement, faster release to production, minimize yield loss due to process failure and more. It is capable of handling 200mm or 300mm wafers. The tool is able to utilize open cassettes, FOUPs or FOSB handling and it is Class I Clean Room compliant, containing an integrated HEPA filter. For more information about our wafer solutions please contact Sonix™ sales: sales@sonix.com. |
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Reconditioned Systems
Occasionally Sonix™ has reconditioned or demo equipment available. These systems carry a full system warranty and many can be upgraded to the latest hardware and software if necessary. Call your local Sonix™ representative for more information or check for system availability..
System Options
Few customers have the same inspection needs. Sonix™ offers a variety of hardware and software options to tailor the system for your exact inspection needs.
Certifications
Sonix™ is the leader in manual and automated scanning acoustic microscopes. As such we strive to achieve and maintain important industry standards on all of our tools. The following is a list of certifications that we hold for our tools. We are also ISO 9001-2000 (A12682) certified.
- SEMI S2 and S8 compliant
- CE certified
- NRTL Certified by TUV
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