AutoWafer Pro

AutoWafer Pro

AutoWafer pro is our most advanced ultrasonic equipment for detecting defects in bonded wafers in a production environment, providing fast, high-resolution scanning of 200mm and 300mm bonded wafers.

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AutoWafer Pro


A flexible, automated wafer inspection system designed for production, AutoWafer Pro provides fast, high-resolution scanning of 200mm and 300mm bonded wafers. It’s the ideal ultrasonic equipment for identifying bond defects in wafer applications such as MEMS, BSI Sensors, CMOS, memory, TSV and LED.

With extensive analysis capabilities at both the wafer and device level, there’s no need to reload and rescan wafers to get all the diagnostic images you need. And with high-speed scanning managed by fully automated wafer handling, AutoWafer Pro supports 100% nondestructive testing (NDT) for improved yields and a faster time to market.

  • The ideal ultrasonic equipment for detecting wafer-to-wafer bonding defects
  • A fully automated, production-ready wafer inspection system for MEMS, CMOS, BSI sensors, memory, TSV, LED and other applications employing wafers 200mm and smaller
  • Provides wafer map with die-level pass/fail indicators (optional)
  • Provides analysis (optional)
  • 200mm SECS/GEM
  • TSV entrenched metrology
  • Fast, high-resolution scanning of 200mm and 300mm wafers for production environments
  • Fully automated robotics using open cassettes, SMIF Pod, FOUPs or FOSB handling
  • Class 1 clean room compliant, with integrated HEPA filter
  • 300mm SECS/GEM (optional)
  • KLARF compatible (optional)

Software Options

Sonix offers powerful wafer software tools to enhance bonded wafer imaging, accelerate production and adapt AutoWafer and AutoWafer Pro to our customers’ specific requirements.


Sonix S-series ultrasonic NDT transducers are designed in-house to meet the demanding nondestructive testing requirements of semiconductor manufacturing. We offer the collaborative expertise to help customers choose the best ultrasonic NDT transducer for their application.

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Sample Analysis

Provide a sample of your product. Sonix will provide you with an in-depth analysis report and help you develop an inspection solution designed to integrate into your process.


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